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专利名称：METHODS OF MANUFACTURING A
MAGNETIC FIELD SENSOR
发明人：Renu WHIG,Phillip MATHER,Kenneth
SMITH,Sanjeev AGGARWAL,JonSLAUGHTER,Nicholas RIZZO
申请号：US16360099申请日：20190321
公开号：US20190221737A1公开日：20190718
专利附图：
摘要：A semiconductor process integrates three bridge circuits, each include
magnetoresistive sensors coupled as a Wheatstone bridge on a single chip to sense amagnetic field in three orthogonal directions. The process includes various depositionand etch steps forming the magnetoresistive sensors and a plurality of flux guides onone of the three bridge circuits for transferring a “Z” axis magnetic field onto sensorsorientated in the XY plane.
申请人：EVERSPIN TECHNOLOGIES, INC.
地址：Chandler AZ US
国籍：US
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