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专利名称：Liquid delivery device, method of controlling
such liquid delivery device, and liquiddelivery pump
发明人：Yamamoto, Shigekazu,Ikegami,
Tetsuma,Sobukawa, Hiroshi,Aiyoshizawa,Shun-ichi,Nakazawa, Toshiharu,Ojima,Yoshinori
申请号：EP98101618.1申请日：19980130公开号：EP0856666A1公开日：19980805
专利附图：
摘要：A screw pump includes a casing (10) having inlet (2a) and outlet (2b) ports and apump rotor rotatably mounted in the casing and having screw threads (12a)
communicating with said inlet and outlet ports. The pump rotor is rotated by a reversiblespeed-controllable motor (20), typically a DC brushless motor, mounted in the casing todeliver a liquid such as a chemical solution from the inlet port through a liquid passagedefined by the screw threads to the outlet port.
申请人：EBARA CORPORATION,EBARA DENSAN LTD.
地址：11-1, Haneda Asahi-cho Ohta-ku, Tokyo JP,11-1, Haneda Asahi-cho, Ohta-kuTokyo JP
国籍：JP,JP
代理机构：Wagner, Karl H., Dipl.-Ing.
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