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专利名称：MEMS MICROPHONE AND METHOD FOR
FORMING THE SAME
发明人：MANHING CHAU申请号：US15013361申请日：20160202
公开号：US20160241965A1公开日：20160818
专利附图：
摘要：A Micro-Electro-Mechanical System (MEMS) microphone and a method forforming the same are provided. The method includes: providing a first substrate includinga first surface and a second surface opposite to each other; providing a second substrate
including a third surface and a fourth surface opposite to each other; bonding the firstsurface of the first substrate and the third surface of the second substrate to each other;removing a second base of the second substrate to form a fifth surface opposite to thethird surface of the second substrate; forming a cavity between the first substrate andthe sensitive region of the second substrate; and forming a first conductive plug from theside of the fifth surface of the second substrate, with the first conductive plug passingthrough to at least one of the conductive layers.
申请人：MEMSEN ELECTRONICS INC
地址：Nankai District CN
国籍：CN
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