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专利名称：ACCELERATION SENSOR AND METHOD OF
PRODUCING THE SAME
发明人：NAKATANI, MASAYA,YAGI, YUJI申请号：EP941737申请日：19980907公开号：EP0937985A4公开日：20030625
摘要：An acceleration sensor made available without using a high-level semiconductortechnology or a micro-machining technology. The sensor detects an acceleration with ahigh precision, yet the manufacturing cost is inexpensive. In the sensor, a silicon substrate(1) is used only for a portion with which a strain is caused by an acceleration, while anauxiliary substrate (4A,4B), a cap (8A,8B) and a mass substance (6A,6B) are formed ofglass material. Joining of the silicon substrate (1) to the mass substance (6A,6B) and theauxiliary substrate (4A,4B), and the auxiliary substrate (4A,4B) to the cap (8A,8B) aremade by direct bonding.
申请人：MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
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