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专利名称：Heat treating apparatus, heat treating
method, and storage medium
发明人：Nobuaki Matsuoka申请号：US11685383申请日：20070313公开号：US07527497B2公开日：20090505
专利附图：
摘要：A heat treating apparatus includes a heating plate for heating a substratecoated with a coating liquid, a cooling plate for cooling the substrate and a heat pipeprovided in the cooling plate, a cooling chamber being moved together with the cooling
plate by the drive mechanism and accommodating a cooling liquid for cooling one endside of the heat pipe. The apparatus further includes a circulation passage provided in theheat treating apparatus to circulate the cooling liquid in the cooling chamber, acirculation pump for circulating the cooling liquid in the circulation passage; and a heatradiating member provided on the circulation passage to radiate the heat received by thecooling chamber to the outside of the heat treating apparatus.
申请人：Nobuaki Matsuoka
地址：Koshi JP
国籍：JP
代理机构：Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
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