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专利名称：HEAT TREATING APPARATUS, HEAT
TREATING METHOD, AND STORAGEMEDIUM
发明人：Nobuaki Matsuoka申请号：US11685383申请日：20070313
公开号：US20070218706A1公开日：20070920
专利附图：
摘要：A heat treating apparatus includes a heating plate for heating a substratecoated with a coating liquid, a cooling plate for cooling the substrate and a heat pipe
provided in the cooling plate, a cooling chamber being moved together with the coolingplate by the drive mechanism and accommodating a cooling liquid for cooling one endside of the heat pipe. The apparatus further includes a circulation passage provided in theheat treating apparatus to circulate the cooling liquid in the cooling chamber, acirculation pump for circulating the cooling liquid in the circulation passage; and a heatradiating member provided on the circulation passage to radiate the heat received by thecooling chamber to the outside of the heat treating apparatus.
申请人：Nobuaki Matsuoka
地址：Koshi-shi JP
国籍：JP
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